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Modules for Academic and Industrial R&D

Modules for Academic and Industrial R&D

JadeMat-ML

MicroLED

Optimal optical inspection module for micro LED. Through sub-micron spatial and sub-nano spectral analysis, JadeMat-ML performs high-speed inspection for epitaxial uniformity, chip process quality before the mass transfer, and panel quality after mass transfer. The module as the core also comes with open interface to work with automation system for mass inspection in production environment.

Features

  • High-resolution fluorescent image
  • Ultra-high spectral acquisition speed
  • High-resolution spectrum acquisition
  • Epi wafer inspection : Bow/warp, wavelength, intensity, FWHM, dominant wavelength, reflection, film thickness
  • Chip wafer inspection : peak wavelength, peak intensity, FWHM, dominant wavelength, CIE XY
  • Panel inspection : EL yield, defects between the glass cover and micro-LED panel
  • Widefield defect inspection included
  • TCP / IP Communication Interface
  • 3rd party development kit

Specifications

#FIRST NAMELAST NAMEUSER NAMEDATE
SamplesEpi: Up to 6” wafer
Chip: R / G / B
Spatial resolutionEpi: 50 µm
Chip: 0.3 µm
Spectral resolution0.3 nm
Spectrum acquisition speed3.6 M Chip / hr
Spectral repeatability+/- 0.5 nm
Intensity repeatability+/- 2.5%
Applicable laser wavelength405 nm / 532 nm ( 561 nm )
Reference Dimensions440 mm x 440 mm x 500 mm

Expansion Module

  • Raman inspection module 
  • TRPL inspection module

Contacts

+886-2-2697-5562
+886-2-2697-3927
service@southport.com.tw
18F-1, No. 95, Sec. 1, Xintai 5th Rd., Xizhi Dist., New Taipei City,Taiwan
南方科技股份有限公司 Southport Corporation
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