JadeSurf is an inspection system that transmits light slices to a specific depth. It solves the problem of the interference of scattered light from the upper and lower layers of the current white light AOI and provides a three-dimensional high-speed measurement solution. A non-destructive approach without pre-treatment directly depicts the three-dimensional appearance and roughness of the surface micro-area, which can be compared to optical AFM. At the same time, the detection of the intermediate layer of transparent materials overcomes the limitation of traditional optics. By directly capturing high-resolution images, various flaws and defects can be observed. In the future, in response to the development trend of the industry and the requirement on the speed for large-area inspection, a high-speed hybrid confocal solution will be proposed, so that the next generation of technology will continue to contribute to solving the pains of related industries.
Through the z-axis stacking scan equipped on JadeSurf, the microwires on the wafer surface (the linewidth is only 1 micron) are observed and verified to be normal and free of collapse. It is confirmed that there is no significant difference between the numerical accuracy measured by JadeSurf and the SEM results.
On high-density circuit boards, JadeSurf can also clearly see the bottom of blind holes that cannot be seen clearly by traditional white light systems. JadeSurf can further measure three-dimensional shape, identify the upper aperture, lower aperture, hole depth, and taper. For the fine crater structure processed by laser, the section results obtained are also consistent with the SEM results.
Because white light systems cannot focus clearly the most difficult thing for transparent materials to observe is the defects on their surface and the interlayer at a certain depth. Jadesurf can overcome this problem, even the scratches hidden in the glass can be directly detected for different depth layers.
The microfluidic biochip needs to be designed with the correct width and depth to achieve the correct microchemical reaction. Using JadeSurf the vertical groove and bottom of the microchannel can be clearly depicted, so as to achieve non-destructive inspection of its channel width and depth.
Transparent photonic crystals achieve their diffraction and interference effects through surface modification. The results of surface modification can be seen clearly by using JadeSurf to make sure whether their spacing, shape, and depth meet the expectations.
The transparent light guide can achieve uniform optical lighting characteristics through modification. If there are textures not expected, the optical characteristics and performance will be greatly degraded. Usually, other brands do too much processing on the image, so that the real defects can not be accurately presented. By the advantages of using JadeSurf the defects causing poor light guide efficiency can be clearly seen.
