Micro Structure
The micro structure sample inspection module can precisely measure the dimensions of bottom structures that are not visible using traditional AOI systems. It is suitable for laser via on high-density circuit boards such as 5G PCB, the surface of a transparent light guide plate, and microfluidic chip grooves. JadeSurf-MS is a confocal-based,3D morphology inspection module specially designed for system integrators!
# | FIRST NAME | LAST NAME | USER NAME | DATE |
---|---|---|---|---|
Max. resolution | 1024 x 1024 | |||
Frame rate | 22 fps ( @512 x 512) | |||
3D display resolution | 1 nm | |||
Applicable laser wavelength | 405 / 638nm | |||
Data bits | 16-bit | |||
Field of view | 5 mm – 16 µm ( 1 mm @ 10x ) | |||
Objective lens | 10x, 50x (options for all kinds of application) | |||
Reference Dimensions | Included white light : 260 x 380 x 155 mm unincluded white light : 215 x 250 x 80 mm |
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