Products
Modules for Academic and Industrial R&D

Modules for Academic and Industrial R&D

JadeSurf-MS

Micro Structure

The micro structure sample inspection module can precisely measure the dimensions of bottom structures that are not visible using traditional AOI systems. It is suitable for laser via on high-density circuit boards such as 5G PCB, the surface of a transparent light guide plate, and microfluidic chip grooves. JadeSurf-MS is a confocal-based,3D morphology inspection module specially designed for system integrators!

Features

  • Microscopic hole diameter and taper analysis
  • High-resolution widefield module
  • Transparent/Translucent micro structures inspection
  • Ultra-high Z resolution
  • TCP/IP Communication Interface
  • 3rd party Development Kit

Specifications

#FIRST NAMELAST NAMEUSER NAMEDATE
Max. resolution1024 x 1024
Frame rate22 fps ( @512 x 512)
3D display resolution1 nm
Applicable laser wavelength405 / 638nm
Data bits16-bit
Field of view5 mm – 16 µm ( 1 mm @ 10x )
Objective lens10x, 50x (options for all kinds of application)
Reference DimensionsIncluded white light :
260 x 380 x 155 mm
unincluded white light :
215 x 250 x 80 mm

Expansion Module

  • Long working distance objective
  • Autofocus module
  • Motorized nosepiece module

Contacts

+886-2-2697-5562
+886-2-2697-3927
service@southport.com.tw
18F-1, No. 95, Sec. 1, Xintai 5th Rd., Xizhi Dist., New Taipei City,Taiwan
南方科技股份有限公司 Southport Corporation
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