MicroLED PL and non-contact leakage detection solution
▪100% non-contact PL characteristics and leakage detection of MicroLED chips before mass transfer ▪Effective binning and screening on every MicroLED chip ▪Ensuring meaningful chip transfer ▪Cost saving by costly chip removal or repairing
| # | FIRST NAME | LAST NAME | USER NAME | DATE |
|---|---|---|---|---|
| Standard mode | High resolution mode | |||
| Available samples | R, G, B MicroLED chip on wafer | |||
| Available wafer size | 2” 4” 6” | |||
| Inspection item | Whole wafer PL scan (PL Intensity, PL wavelength, PL FWHM, PL dominant wavelength) Non-contact whole wafer leakage chip detection | |||
| Measurement time | PL scan: 7.5 mins Leakage detection : 15 mins | PL scan: 30 mins Leakage detection : 60 mins | ||
| Spatial resolution | 2 um/pixel | 1 um/pixel | ||
